Error en SPICE

[linapch]

Tengo este código, pero me aparecen dos errores:
.model NMOS NMOS LEVEL = 2
+ TOX = 380E-10 VTO = .9418 NSUB = 2.639E16 UO = 648.2
+ UCRIT = 1E4 UEXP = .06857 NFS = 710.8E9 WD = .4086E-6
+ DELTA = 2.2 RS = 93.77 LD = .9132E-6 XJ = .0824E-6
+ VMAX = 59.62E3 NEFF = 1.479 CJ = 3.495E-4 MJ = .3950
+ CJSW = 5.952E-10 MJSW = .2941 PB = .65
.model PMOS PMOS LEVEL = 2
+ TOX = 380E-10 VTO = -1.139 NSUB = 1.355E16 UO = 212.7
+ UCRIT = 1E4 UEXP = .1159 NFS = 662.4E9 WD = .4268E-6
+ DELTA = 1.824 RS = 134.9 LD = .8101E-6 XJ = 2.783E-9
+ VMAX = 120.3E3 NEFF = .06665 CJ = 3.816E-4 MJ = .3499
+ CJSW = 7.384E-10 MJSW = .3916 PB = .56
**circuit description**
**DC supplies**
Vcc 1 0 DC +5V
**imput digital signal **
Vi 3 0 DC 1.237 PWL (0,0V 10ns, 5v 10.1ns, 5v 30ns, 0v 30.1ns, 0v 50ns,0)
**first CMOS inverter**
M1 2 3 0 0 NMOS L=3um W=3um
M2 2 3 1 1 PMOS L=3um W=9um
C11 2 0 0.1pF
*Second CMOS inverter
M3 4 2 0 0 NMOS L=3um W=3um
M4 4 2 1 1 PMOS L=3um W=9um
C12 4 0 0.1pF
**analisis request **
.TRAN 0.1ns 50ns 0ns 0.1ns
**Output request**
.PLOT TRAN V(2) V(3) V(4)
.probe
.end

____
Esto sale:

+ TOX = 380E-10 VTO = .9418 NSUB = 2.639E16 UO = 648.2
------------------------------------------$
ERROR(ORPSIM-16153): unknown parameter
+ UCRIT = 1E4 UEXP = .06857 NFS = 710.8E9 WD = .4086E-6
+ DELTA = 2.2 RS = 93.77 LD = .9132E-6 XJ = .0824E-6
+ VMAX = 59.62E3 NEFF = 1.479 CJ = 3.495E-4 MJ = .3950
+ CJSW = 5.952E-10 MJSW = .2941 PB = .65
.model PMOS PMOS LEVEL = 2
+ TOX = 380E-10 VTO = -1.139 NSUB = 1.355E16 UO = 212.7
+ UCRIT = 1E4 UEXP = .1159 NFS = 662.4E9 WD = .4268E-6
+ DELTA = 1.824 RS = 134.9 LD = .8101E-6 XJ = 2.783E-9
+ VMAX = 120.3E3 NEFF = .06665 CJ = 3.816E-4 MJ = .3499
+ CJSW = 7.384E-10 MJSW = .3916 PB = .56
**circuit description**
**DC supplies**
Vcc 1 0 DC +5V
**imput digital signal **
Vi 3 0 DC 1.237 PWL (0,0V 10ns, 5v 10.1ns, 5v 30ns, 0v 30.1ns, 0v 50ns,0)
**first CMOS inverter**
M1 2 3 0 0 NMOS L=3um W=3um
M2 2 3 1 1 PMOS L=3um W=9um
C11 2 0 0.1pF
*Second CMOS inverter
M3 4 2 0 0 NMOS L=3um W=3um
M4 4 2 1 1 PMOS L=3um W=9um
C12 4 0 0.1pF
**analisis request **
.TRAN 0.1ns 50ns 0ns 0.1ns
**Output request**
.PLOT TRAN V(2) V(3) V(4)
.probe
.end